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The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo–transfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium. The FS1012 offers key advantages over resistor–based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal–to–noise ratio. The sensor comprises a “solid” thermal isolation technology and silicon–carbide coating to protect
it from abrasive wear and provides robustness and long–term reliability. In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. The FS1012 features the sensor fully assembled and wire–bonded out to a 6–pin header. Wetted materials consist of a glass fiber reinforced PA66 resin, epoxy, and silicon carbide.
Specifications:
- Fast response: <5ms
- Millivolt output
- Supply voltage: 3V to 5V
- Module operating temperature range: 0°C to +85°C
Features:
- Gas or liquid mediums
- Robust “solid” isolation technology
- Resistant to surface contamination
- No cavity to cause clogging
- Resistant to vibration and pressure shock
- Low power application
- Sensitive at low flow rates and differential pressure levels
Packages Includes:
- 1 x RENESAS Flow Sensor, FS1012 Series, Gas, MEMS, 10000 SCCM, 3 V to 5 V, mV Output
